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MicroCT Bar Pattern NANO Phantom containing two 3 x 3 mm² silicon chips, mounted horizontally and vertically, fixed in the centre of the phantom by means of a plastic holder. The two silicon chips each show an array of lines or dots, with line widths and dot diameters ranging from 1µm to 15µm, and the depth of the structure varying between 5 and 15µm. With a single exposure and measurement, the user can assess the resolution of the entire chip, both at the centre and at the periphery. The planar and axial spatial resolution of the 3D high-resolution micro-CT (Micro-CT) system is evaluated in the most direct and visible way. Place of origin: Germany
Name：MicroCT-Barpattern-NANO
Mould Parameters
Diameter: 5.2mm
Height: 19.1mm
Material: dense plastic Chip parameters
Diameter: 2.96mm
Height: 0.66mm
Material: Silicon
Chip structure: 1-15µm
Depth of structure : 5-15µm
Contrast Material : Silicon/Air Correspondence between line width/dot width and number of pairs on the chip Patterns for 1 to 15 µm structures Chip Structure Distribution Chip Structure Description Part 1 Structure Part 2 Structure